Axcelis Style, Ion Implantation
Our Bayard Alpert, G7631-2 ionization gauge is a twin tungsten filament gauge. The twin tungsten filaments operate at a very high temperature and are relatively insensitive to contamination found in implanter or sputtering systems. The tungsten filaments are, however, susceptible to failure by oxidation due to poor vacuum or sudden pressurization. Our gauges are most accurate continuous indicators for pressures below 1 x 10-3 Torr. See our Ionization Gauge Operating Details and Ionization Gauge Cross Reference Guide.
