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Vacuum Measurement Gauges and Controllers

We supply many of the most commonly used vacuum pressure gauges including, Bayard Alpert glass and nude gauges, UHV nude gauges, Convection gauges, Piriani gauges, and Thermocouple gauges. All of our vacuum measurement gauges are identical to or functionally equivalent to the competitive tubes listed. Gauges are stock items and we offer competitive pricing. Contact us at 617-227-1133 or email for cross reference questions and quantity pricing.

ionization gauge tube

Ionization Gauge Tubes

We have a variety of Bayard-Alpert, Broad Range, and Triode style glass enveloped ionization gauges that are identical or equivalent to the AMAT, Axcelis, Novellus, Agilent, MRC, Ulvac, and MKS gauges. Our ionization gauges are available in single iridium or twin tungsten filaments and in 1”, ¾”, and .709” Pyrex glass or Kovar tubulation with optional flanges for Kovar tubulated gauges. See our cross reference and pricing information.  See our  Bayard Alpert Ionization Gauge Cross Reference Guide.


Thermocouple Gauges, Digital Controllers

We have thermocouple gauges that are drop in replacements for the Hastings, Agilent, Axcelis, AMAT, Novellus, MKS and other OEM gauges. Our thermocouple gauges are available in the standard 1/8” NPT, VCR, KF16, or KF25 fittings. Fil-Tech also supplies Digital thermocouple controllers for our TC531 and TC6M gauges that measure from 1 x 10-3 torr to atmosphere and mount easily in the industry standard 3 bolt pattern.  See our complete Thermocouple Cross Reference Guide.

InstruTech Convection and Hot Cathode Ionization Gauges and Controllers

We supply InstruTech Convection and Hot Cathode Ionization gauges that are drop in replacements for MKS, Axcelis, Applied, and other OEM gauges with a variety of fittings including 1/8” NPT, NW16KF, NW25KF, and others. Our  gauges are plug compatible and drop in replacements with guaranteed identical performance to the OEM products. Visit us for all InstruTech gauges and controllers.


Nude Ionization Gauge Tubes, Replacement Filaments and Rebuilds

We offer a wide range of nude gauges in UHV nude and Bayard-Alpert nude styles that will replace gauges from Agilent, MKS, Axcelis and others. We also supply nude flanged gauges with protected pins. Replacement filaments for all nude gauges are also available and we can rebuild your nude gauges. Call for pricing and cross reference information.  See our Nude Ionization Gauge Cross Reference Guide.

INFICON Vacuum Gauges

Fil-Tech is an authorized distributor of INFICON vacuum gauges.  We supply INFICON’s Pirani Standard, Pirani Standard Advanced, Pirani Capacitance Diaphragm, Bayard-Alpert, Bayard-Alpert Pirani, Bayard-Alpert Pirani Capacitance Diaphragm, Inverted Magnetron Pirani, and Penning Cold Cathode gauges.  Choose your gauge from INFICON’s website and call us for competitive pricing  We look forward to working with you.

Ion Multi Gauge Controller

We supply a low cost multi gauge controller that supports Bayard Alpert ion gauges and any other existing vacuum gauge on the market based on the 1-10V output standard.  See our MG15.