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Thermocouple Gauge Tubes and Digital Controllers

We have thermocouple gauges that are drop in replacements for the Hastings, Agilent, Axcelis, AMAT, Novellus, MKS and other OEM gauges. Our thermocouple gauges are available in the standard 1/8” NPT, VCR, KF16, or KF25 fittings. Fil-Tech also supplies Digital thermocouple controllers for our TC531 and TC6M gauges that measure from 1 x 10-3 torr to atmosphere and mount easily in the industry standard 3 bolt pattern.  See our complete Thermocouple Cross Reference Guide.