Electron Beam Gun Parts

We supply replacement parts for Temescal, Telemark, Sloan, Satisloh, Thermionics, and Leybold electron beam guns for electron beam evaporation. We also supply crucibles and covers, crucible liners and deposition materials. Our electron beam gun deposition parts are in stock and our pricing is competitive. Please check our cross reference listings, call us at 800-743-1743 or email paula@filtech.com for quantity pricing.

Crucible Liners

Crucible Liners

Fil-Tech supplies 4cc, 7cc, 15cc, 25cc, 30cc, and 40cc crucible liners for Temescal and Telemark electron beam gun crucibles in Graphite, Tungsten, Molybdenum, Aluminum Oxide, Boron Nitride, Copper, Intermetallic, Molybdenum, and Vitreous Carbon. We can also fabricate custom liners for your ebeam guns, made to your specifications. Please call and ask for Paula for pricing or cross reference information.


Crucibles and Covers

We supply OFHC crucibles and covers for Temescal and Telemark electron beam guns. Crucibles are 15cc or 25cc with 4 or 6 pockets.


Deposition Materials and Tungsten Rods

Fil-Tech supplies high purity Silicon Dioxide specially designed for electron beam evaporation and chrome plated tungsten rods for ebeam guns.

Multi Pocket Emitter

Multi, Single, and High Performance Emitters

We supply electron beam gun replacement parts for your Multi and Single Pocket and High Performance Emitters from Temescal, Telemark, Thermionics, Satisloh, MeiVac, Sloan, and Leybold. We supply the emitter assembly filaments, insulators, electromagnetic coils, and all parts or the complete assembled emitters for your ebeam guns. We can also rebuild your emitters.