Ion Source Parts

We supply replacements parts for Veeco Commonwealth Mark I and Mark II, Ion Tech, and Satisloh ion source equipment, including filaments, insulators, anodes, gas distributors, cathode tips and keepers. All of our parts are identical to or functionally equivalents to the competitive parts listed and are drop in replacements. Our parts are stock items and we offer competitive pricing. Call us at 800-743-1743 or email paula@filtech.com for quantity pricing.

IS18003S

Satisloh

We supply Satisloh ion source parts. Please check our cross reference part number and pricing information here.

IS0035IS3107IonTech

Veeco Ion Tech

We supply Veeco Ion Tech 3 and 5 cm ion source gun parts including filaments and insulators at considerable savings. Please visit us for savings.

MarkIiisil

Veeco Mark I

We offer a complete listing of replacement parts for Veeco Commonwealth Mark I ion source parts, including insulators, filaments, anodes, gas distributors and source parts. All Mark I parts are offered at considerable savings.

Mark II Cathode Tip

Veeco Mark II

We supply a complete listing of replacement parts for Veeco Commonwealth Mark II ion source parts, including insulators, filaments, gas distributors, cathode tips, keepers and source parts. All Mark II parts are offered at considerable savings.