Ion Source Parts For

We supply replacements parts for Veeco Commonwealth Mark I and Mark II, Ion Tech, and Satisloh ion source equipment, including filaments, insulators, anodes, gas distributors, cathode tips, keepers and other parts. All of our parts are identical to or functionally equivalent to the competitive parts listed and are drop in replacements. Our parts are stock and we offer competitive pricing. Call us at 800-743-1743 or email paula@filtech.com for quantity pricing.

MarkIiisil

Veeco Commonwealth Mark I and Satisloh

We offer a complete listing of replacement parts for Veeco Commonwealth Mark I and Satisloh ion source parts, including insulators, filaments, anodes, gas distributors and other source parts. All Mark I and Satisloh parts are drop in replacements for the OEM parts.

Mark II Cathode Tip

Veeco Commonwealth Mark II and Satisloh

We supply a complete listing of replacement parts for Veeco Commonwealth Mark II and Satisloh Ion Sources, including insulators, filaments, gas distributors, cathode tips, keepers and other source parts. All Mark II and comparable Satisloh style parts are offered at considerable savings.

IS0035IS3107IonTech

Veeco Ion Tech

We supply Veeco Ion Tech 3 and 5 cm ion source gun parts including filaments and insulators at considerable savings. Our parts are drop in replacements for the OEM parts.