Crystals, Hardware and Monitors

Fil-Tech is a worldwide supplier and manufacturer of replacement quartz crystals for thin film monitors and controllers. Our crystals are manufactured in the USA and we are renowned for our quality, reliability and competitive pricing. We also manufacture hardware and supply monitors for your thin film coating requirements. Call us for quantity pricing at 800-743-1743 or 617-227-1133, or email Paula at


Liquid Plating Crystals

We also manufacture liquid plating crystals comparable with Stanford Research Systems, Inficon and Q-Sense liquid plating crystals in gold, platinum, copper, titanium, silicone dioxide and other materials. We can also custom coat to your requirements.


Quality Crystals 6MHz, 5MHz and 4.4MHz

Quality Crystals® from Fil-Tech, QI8010 and QI8008!  Fil-Tech manufactures 6MHz, 5MHz and 4.4MHz piezo sensor crystals coated in Gold, Stress Relieving Alloy®, Longer Life Gold®, and Advanced Adhesion Alloy®. Fil-Tech offers replacement crystals comparable with Inficon/Maxtek, Satisloh, Balzers, Umicore, Ulvac, Sloan, Intellemetrics, Phelps and Veeco crystals.   Learn more about our quality quartz crystals from our 15 Technical Bulletins.

Fil-Tech Rate Monitor and Single Sensor Head

Rate/Thickness Monitors, QC Microbalance and Sputter Gun Switch

Fil-Tech supplies rate thickness crystal monitors and thin film deposition controllers for your Typical System.   See our SQM160, SQM200, and SQM220 below.  Click twice for all monitor details.

Are you sputtering? See our NEW SGS101 Sputter Gun Switch which allows you to operate multiple sputter guns from one power supply with our SGS101.

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SEM Service

Let us help you solve your process problems by examining your “problem” crystal under a Scanning Electron Microscope. We will analyze your crystal and send you a SEM report with our findings. Contact for Technical Assistance.

dual sensor head with shutter

Sensor Heads, Feedthroughs, Sputter Heads, Magnetron Source, Cables, Oscillators and Parts

Fil-Tech manufactures single and dual sensor heads with or without shutter, single and dual feedthroughs on 1” bolt or 2 ¾” flange, sputter heads, magnetron sputter sources, oscillators, cables and their parts. We can also manufacture custom hardware and assemblies to your specifications.