Fil-Tech Fluid dramatically increases bearing life in vacuum and semiconductor processes
by reducing friction. It has
exceptional lubrication properties for sliding and rotating applications to 10-8 Torr. Fil-Tech
Fluid functions in a wide
temperature range (-20C to 260C) and is chemically inert in the presence of most semiconductor gasses
such as fluorine at
200C and trifluoride at 50C.
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